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Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry
In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measu...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6929118/ https://www.ncbi.nlm.nih.gov/pubmed/31766448 http://dx.doi.org/10.3390/s19235094 |
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author | Jeon, Jun Woo Joo, Ki-Nam |
author_facet | Jeon, Jun Woo Joo, Ki-Nam |
author_sort | Jeon, Jun Woo |
collection | PubMed |
description | In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry. |
format | Online Article Text |
id | pubmed-6929118 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-69291182019-12-26 Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry Jeon, Jun Woo Joo, Ki-Nam Sensors (Basel) Article In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry. MDPI 2019-11-21 /pmc/articles/PMC6929118/ /pubmed/31766448 http://dx.doi.org/10.3390/s19235094 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Jeon, Jun Woo Joo, Ki-Nam Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry |
title | Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry |
title_full | Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry |
title_fullStr | Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry |
title_full_unstemmed | Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry |
title_short | Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry |
title_sort | single-shot imaging of two-wavelength spatial phase-shifting interferometry |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6929118/ https://www.ncbi.nlm.nih.gov/pubmed/31766448 http://dx.doi.org/10.3390/s19235094 |
work_keys_str_mv | AT jeonjunwoo singleshotimagingoftwowavelengthspatialphaseshiftinginterferometry AT jookinam singleshotimagingoftwowavelengthspatialphaseshiftinginterferometry |