Cargando…

Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry

In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measu...

Descripción completa

Detalles Bibliográficos
Autores principales: Jeon, Jun Woo, Joo, Ki-Nam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6929118/
https://www.ncbi.nlm.nih.gov/pubmed/31766448
http://dx.doi.org/10.3390/s19235094
_version_ 1783482630736445440
author Jeon, Jun Woo
Joo, Ki-Nam
author_facet Jeon, Jun Woo
Joo, Ki-Nam
author_sort Jeon, Jun Woo
collection PubMed
description In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry.
format Online
Article
Text
id pubmed-6929118
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-69291182019-12-26 Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry Jeon, Jun Woo Joo, Ki-Nam Sensors (Basel) Article In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry. MDPI 2019-11-21 /pmc/articles/PMC6929118/ /pubmed/31766448 http://dx.doi.org/10.3390/s19235094 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Jeon, Jun Woo
Joo, Ki-Nam
Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry
title Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry
title_full Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry
title_fullStr Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry
title_full_unstemmed Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry
title_short Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry
title_sort single-shot imaging of two-wavelength spatial phase-shifting interferometry
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6929118/
https://www.ncbi.nlm.nih.gov/pubmed/31766448
http://dx.doi.org/10.3390/s19235094
work_keys_str_mv AT jeonjunwoo singleshotimagingoftwowavelengthspatialphaseshiftinginterferometry
AT jookinam singleshotimagingoftwowavelengthspatialphaseshiftinginterferometry