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Maskless, rapid manufacturing of glass microfluidic devices using a picosecond pulsed laser
Conventional manufacturing of glass microfluidic devices is a complex, multi-step process that involves a combination of different fabrication techniques, typically photolithography, chemical/dry etching and thermal/anodic bonding. As a result, the process is time-consuming and expensive, in particu...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6934552/ https://www.ncbi.nlm.nih.gov/pubmed/31882878 http://dx.doi.org/10.1038/s41598-019-56711-5 |