Highly Fluorinated Barium Titanate Nanoparticle Dispersion for Fabrication of Lithographically Patterned Thin Films

We report the synthesis, characterization, and photopatterning of high-k inorganic nanoparticles that are covered with highly fluorinated carboxylic acid and, as a result, are solution-processable in fluorous liquids. Barium titanate (BTO) nanoparticles, 7–8 nm in diameter, were prepared under solvothermal conditions and were surface-modified with perfluoroalkyl ether-type carboxylic acid molecules via ligand-exchange reactions. Thin films with a high dielectric constant (9.27 at 1 kHz) were achieved by spin-coating homogeneous solutions of BTO nanoparticles in a fluorous solvent (HFE-7500). Additionally, electron-beam lithography and photolithography were applied to the thin films of BTO nanoparticles, yielding BTO patterns with scales of 300 nm and 5 μm, respectively. Thus, an approach for a chemically non-damaging solution process of inorganic materials for device implementation was successfully demonstrated.