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Atmospheric Pressure Plasma Processing of an Optical Sinusoidal Grid

Sinusoidal grid with nanometric precision is adopted as a surface encoder to measure multiple degree-of-freedom motions. This paper proposes the atmospheric pressure plasma processing (APPP) technique to fabricate an optical sinusoidal grid surface. The characteristics of removal function and surfac...

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Detalles Bibliográficos
Autores principales:	Li, Duo, Li, Na, Su, Xing, Ji, Peng, Wang, Bo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Technical Note
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6953015/ https://www.ncbi.nlm.nih.gov/pubmed/31795261 http://dx.doi.org/10.3390/mi10120828

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