Study on a High Performance MEMS Infrared Thermopile Detector

This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent is...

Descripción completa

Detalles Bibliográficos
Autores principales: Bao, Aida, Lei, Cheng, Mao, Haiyang, Li, Ruirui, Guan, Yihao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6953050/
https://www.ncbi.nlm.nih.gov/pubmed/31847124
http://dx.doi.org/10.3390/mi10120877
Descripción
Sumario:This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.

Ejemplares similares