Study on a High Performance MEMS Infrared Thermopile Detector

This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent is...

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Detalles Bibliográficos
Autores principales: Bao, Aida, Lei, Cheng, Mao, Haiyang, Li, Ruirui, Guan, Yihao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6953050/
https://www.ncbi.nlm.nih.gov/pubmed/31847124
http://dx.doi.org/10.3390/mi10120877
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author Bao, Aida
Lei, Cheng
Mao, Haiyang
Li, Ruirui
Guan, Yihao
author_facet Bao, Aida
Lei, Cheng
Mao, Haiyang
Li, Ruirui
Guan, Yihao
author_sort Bao, Aida
collection PubMed
description This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor.
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spelling pubmed-69530502020-01-23 Study on a High Performance MEMS Infrared Thermopile Detector Bao, Aida Lei, Cheng Mao, Haiyang Li, Ruirui Guan, Yihao Micromachines (Basel) Article This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent isotropic etching-caused damage on the device. The responsivity of the detector achieved 1151.14 V/W, and the measured response time was 14.46 ms. The detector had the potential to work as a high-precision temperature sensor and as a vacuum sensor. MDPI 2019-12-13 /pmc/articles/PMC6953050/ /pubmed/31847124 http://dx.doi.org/10.3390/mi10120877 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Bao, Aida
Lei, Cheng
Mao, Haiyang
Li, Ruirui
Guan, Yihao
Study on a High Performance MEMS Infrared Thermopile Detector
title Study on a High Performance MEMS Infrared Thermopile Detector
title_full Study on a High Performance MEMS Infrared Thermopile Detector
title_fullStr Study on a High Performance MEMS Infrared Thermopile Detector
title_full_unstemmed Study on a High Performance MEMS Infrared Thermopile Detector
title_short Study on a High Performance MEMS Infrared Thermopile Detector
title_sort study on a high performance mems infrared thermopile detector
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6953050/
https://www.ncbi.nlm.nih.gov/pubmed/31847124
http://dx.doi.org/10.3390/mi10120877
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AT leicheng studyonahighperformancememsinfraredthermopiledetector
AT maohaiyang studyonahighperformancememsinfraredthermopiledetector
AT liruirui studyonahighperformancememsinfraredthermopiledetector
AT guanyihao studyonahighperformancememsinfraredthermopiledetector

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