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Study on a High Performance MEMS Infrared Thermopile Detector

This paper presents a high-performance micro-electromechanical systems (MEMS) thermopile infrared detector. It consists of a double-end beam and a dual-layer thermocouple structure, which improves the responsivity of the detector. The etch-stop structure is integrated into the detector to prevent is...

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Detalles Bibliográficos
Autores principales:	Bao, Aida, Lei, Cheng, Mao, Haiyang, Li, Ruirui, Guan, Yihao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6953050/ https://www.ncbi.nlm.nih.gov/pubmed/31847124 http://dx.doi.org/10.3390/mi10120877

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