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Observation of a Correlation Between Internal friction and Urbach Energy in Amorphous Oxides Thin Films
We have investigated by spectroscopic ellipsometry (SE, 190–1700 nm) the optical properties of uniform, amorphous thin films of Ta(2)O(5) and Nb(2)O(5) as deposited and after annealing, and after so-called “doping” with Ti atoms which leads to mixed oxides. Ta(2)O(5) and Ti:Ta(2)O(5) are currently u...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6997387/ https://www.ncbi.nlm.nih.gov/pubmed/32015356 http://dx.doi.org/10.1038/s41598-020-58380-1 |