Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊(044)) and tilt of suspended monolithic silicon nanowire structures

Silicon nanowire-based sensors find many applications in micro- and nano-electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and nano-fabricated silicon-based structures adopt...

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Detalles Bibliográficos
Autores principales: Dolabella, Simone, Frison, Ruggero, Chahine, Gilbert A., Richter, Carsten, Schulli, Tobias U., Tasdemir, Zuhal, Alaca, B. Erdem, Leblebici, Yusuf, Dommann, Alex, Neels, Antonia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2020
Materias:
Research Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6998783/
https://www.ncbi.nlm.nih.gov/pubmed/32047404
http://dx.doi.org/10.1107/S1600576719015504

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6998783/
https://www.ncbi.nlm.nih.gov/pubmed/32047404
http://dx.doi.org/10.1107/S1600576719015504

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