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Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊(044)) and tilt of suspended monolithic silicon nanowire structures
Silicon nanowire-based sensors find many applications in micro- and nano-electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and nano-fabricated silicon-based structures adopt...
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
International Union of Crystallography
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6998783/ https://www.ncbi.nlm.nih.gov/pubmed/32047404 http://dx.doi.org/10.1107/S1600576719015504 |