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Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors

Nowadays, it is still technologically challenging to prepare highly sensitive sensing films using microelectrical mechanical system (MEMS) compatible methods for miniaturized sensors with low power consumption and high yield. Here, sensitive cross-linked SnO(2):NiO networks were successfully fabrica...

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Detalles Bibliográficos
Autores principales: Tong, Weiguang, Wang, Ying, Bian, Yuzhi, Wang, Anqi, Han, Ning, Chen, Yunfa
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7002749/
https://www.ncbi.nlm.nih.gov/pubmed/32025974
http://dx.doi.org/10.1186/s11671-020-3269-3
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author Tong, Weiguang
Wang, Ying
Bian, Yuzhi
Wang, Anqi
Han, Ning
Chen, Yunfa
author_facet Tong, Weiguang
Wang, Ying
Bian, Yuzhi
Wang, Anqi
Han, Ning
Chen, Yunfa
author_sort Tong, Weiguang
collection PubMed
description Nowadays, it is still technologically challenging to prepare highly sensitive sensing films using microelectrical mechanical system (MEMS) compatible methods for miniaturized sensors with low power consumption and high yield. Here, sensitive cross-linked SnO(2):NiO networks were successfully fabricated by sputtering SnO(2):NiO target onto the etched self-assembled triangle polystyrene (PS) microsphere arrays and then ultrasonically removing the PS microsphere templates in acetone. The optimum line width (~ 600 nm) and film thickness (~ 50 nm) of SnO(2):NiO networks were obtained by varying the plasma etching time and the sputtering time. Then, thermal annealing at 500 °C in H(2) was implemented to activate and reorganize the as-deposited amorphous SnO(2):NiO thin films. Compared with continuous SnO(2):NiO thin film counterparts, these cross-linked films show the highest response of ~ 9 to 50 ppm ethanol, low detection limits (< 5 ppm) at 300 °C, and also high selectivity against NO(2), SO(2), NH(3), C(7)H(8), and acetone. The gas-sensing enhancement could be mainly attributed to the creating of more active adsorption sites by increased stepped surface in cross-linked SnO(2):NiO network. Furthermore, this method is MEMS compatible and of generality to effectively fabricate other cross-linked sensing films, showing the promising potency in the production of low energy consumption and wafer-scale MEMS gas sensors.
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spelling pubmed-70027492020-02-25 Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors Tong, Weiguang Wang, Ying Bian, Yuzhi Wang, Anqi Han, Ning Chen, Yunfa Nanoscale Res Lett Nano Express Nowadays, it is still technologically challenging to prepare highly sensitive sensing films using microelectrical mechanical system (MEMS) compatible methods for miniaturized sensors with low power consumption and high yield. Here, sensitive cross-linked SnO(2):NiO networks were successfully fabricated by sputtering SnO(2):NiO target onto the etched self-assembled triangle polystyrene (PS) microsphere arrays and then ultrasonically removing the PS microsphere templates in acetone. The optimum line width (~ 600 nm) and film thickness (~ 50 nm) of SnO(2):NiO networks were obtained by varying the plasma etching time and the sputtering time. Then, thermal annealing at 500 °C in H(2) was implemented to activate and reorganize the as-deposited amorphous SnO(2):NiO thin films. Compared with continuous SnO(2):NiO thin film counterparts, these cross-linked films show the highest response of ~ 9 to 50 ppm ethanol, low detection limits (< 5 ppm) at 300 °C, and also high selectivity against NO(2), SO(2), NH(3), C(7)H(8), and acetone. The gas-sensing enhancement could be mainly attributed to the creating of more active adsorption sites by increased stepped surface in cross-linked SnO(2):NiO network. Furthermore, this method is MEMS compatible and of generality to effectively fabricate other cross-linked sensing films, showing the promising potency in the production of low energy consumption and wafer-scale MEMS gas sensors. Springer US 2020-02-05 /pmc/articles/PMC7002749/ /pubmed/32025974 http://dx.doi.org/10.1186/s11671-020-3269-3 Text en © The Author(s). 2020 Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
spellingShingle Nano Express
Tong, Weiguang
Wang, Ying
Bian, Yuzhi
Wang, Anqi
Han, Ning
Chen, Yunfa
Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors
title Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors
title_full Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors
title_fullStr Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors
title_full_unstemmed Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors
title_short Sensitive Cross-Linked SnO(2):NiO Networks for MEMS Compatible Ethanol Gas Sensors
title_sort sensitive cross-linked sno(2):nio networks for mems compatible ethanol gas sensors
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7002749/
https://www.ncbi.nlm.nih.gov/pubmed/32025974
http://dx.doi.org/10.1186/s11671-020-3269-3
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