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Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering
The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM)...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Elsevier
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7005493/ https://www.ncbi.nlm.nih.gov/pubmed/32055672 http://dx.doi.org/10.1016/j.dib.2020.105205 |
Sumario: | The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating. |
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