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Porous Si-SiO(2) based UV Microcavities

Obtaining silicon-based photonic-structures in the ultraviolet range would expand the wavelength bandwidth of silicon technology, where it is normally forbidden. Herein, we fabricated porous silicon microcavities by electrochemical etching of alternating high and low refraction index layers; and wer...

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Detalles Bibliográficos
Autores principales: Jimenéz-Vivanco, María R., García, Godofredo, Carrillo, Jesús, Agarwal, Vivechana, Díaz-Becerril, Tomás, Doti, Rafael, Faubert, Jocelyn, Lugo, J. E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7010755/
https://www.ncbi.nlm.nih.gov/pubmed/32041997
http://dx.doi.org/10.1038/s41598-020-59001-7