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Compensation of Hysteresis in the Piezoelectric Nanopositioning Stage under Reciprocating Linear Voltage Based on a Mark-Segmented PI Model
The nanopositioning stage with a piezoelectric driver usually compensates for the nonlinear outer-loop hysteresis characteristic of the piezoelectric effect using the Prandtl–Ishlinskii (PI) model under a single-ring linear voltage, but cannot accurately describe the characteristics of the inner-loo...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019321/ https://www.ncbi.nlm.nih.gov/pubmed/31861513 http://dx.doi.org/10.3390/mi11010009 |