Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses

Lithium niobate (LiNbO(3)) has become popular with applications in electronics and communication industries due to its excellent electro-optical and nonlinear properties. This paper presents the influence of laser power, repetition frequency, number of subpulses, depth of each pass, and scanning vel...

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Autores principales: Lei, Mingwei, Gao, Wenyan, Li, Guang, Wu, Xinping, Li, Benhai, Wang, Xuefeng, Wang, Junlong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019901/
https://www.ncbi.nlm.nih.gov/pubmed/31906043
http://dx.doi.org/10.3390/mi11010051
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author Lei, Mingwei
Gao, Wenyan
Li, Guang
Wu, Xinping
Li, Benhai
Wang, Xuefeng
Wang, Junlong
author_facet Lei, Mingwei
Gao, Wenyan
Li, Guang
Wu, Xinping
Li, Benhai
Wang, Xuefeng
Wang, Junlong
author_sort Lei, Mingwei
collection PubMed
description Lithium niobate (LiNbO(3)) has become popular with applications in electronics and communication industries due to its excellent electro-optical and nonlinear properties. This paper presents the influence of laser power, repetition frequency, number of subpulses, depth of each pass, and scanning velocity in picosecond laser dicing on multiple characteristics of LiNbO(3) using the Taguchi method. By means of analysis of variance and analysis of relations between the characteristics, the optimal ps-laser-dicing parameter is obtained with good quality and high efficiency, which is applied to LiNbO(3) products. The result indicates that picosecond laser dicing provides an alternative to machine thick LiNbO(3) wafers with narrow kerf width, micro chipping, smooth surface, and high productivity.
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spelling pubmed-70199012020-03-09 Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses Lei, Mingwei Gao, Wenyan Li, Guang Wu, Xinping Li, Benhai Wang, Xuefeng Wang, Junlong Micromachines (Basel) Article Lithium niobate (LiNbO(3)) has become popular with applications in electronics and communication industries due to its excellent electro-optical and nonlinear properties. This paper presents the influence of laser power, repetition frequency, number of subpulses, depth of each pass, and scanning velocity in picosecond laser dicing on multiple characteristics of LiNbO(3) using the Taguchi method. By means of analysis of variance and analysis of relations between the characteristics, the optimal ps-laser-dicing parameter is obtained with good quality and high efficiency, which is applied to LiNbO(3) products. The result indicates that picosecond laser dicing provides an alternative to machine thick LiNbO(3) wafers with narrow kerf width, micro chipping, smooth surface, and high productivity. MDPI 2019-12-31 /pmc/articles/PMC7019901/ /pubmed/31906043 http://dx.doi.org/10.3390/mi11010051 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Lei, Mingwei
Gao, Wenyan
Li, Guang
Wu, Xinping
Li, Benhai
Wang, Xuefeng
Wang, Junlong
Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses
title Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses
title_full Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses
title_fullStr Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses
title_full_unstemmed Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses
title_short Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses
title_sort good-quality and high-efficiency dicing for thick linbo(3) wafers using picosecond laser pulses
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019901/
https://www.ncbi.nlm.nih.gov/pubmed/31906043
http://dx.doi.org/10.3390/mi11010051
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