Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses

Lithium niobate (LiNbO(3)) has become popular with applications in electronics and communication industries due to its excellent electro-optical and nonlinear properties. This paper presents the influence of laser power, repetition frequency, number of subpulses, depth of each pass, and scanning vel...

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Detalles Bibliográficos
Autores principales: Lei, Mingwei, Gao, Wenyan, Li, Guang, Wu, Xinping, Li, Benhai, Wang, Xuefeng, Wang, Junlong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019901/
https://www.ncbi.nlm.nih.gov/pubmed/31906043
http://dx.doi.org/10.3390/mi11010051

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019901/
https://www.ncbi.nlm.nih.gov/pubmed/31906043
http://dx.doi.org/10.3390/mi11010051

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