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Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses

Lithium niobate (LiNbO(3)) has become popular with applications in electronics and communication industries due to its excellent electro-optical and nonlinear properties. This paper presents the influence of laser power, repetition frequency, number of subpulses, depth of each pass, and scanning vel...

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Detalles Bibliográficos
Autores principales:	Lei, Mingwei, Gao, Wenyan, Li, Guang, Wu, Xinping, Li, Benhai, Wang, Xuefeng, Wang, Junlong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019901/ https://www.ncbi.nlm.nih.gov/pubmed/31906043 http://dx.doi.org/10.3390/mi11010051

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