Recent Progress of Miniature MEMS Pressure Sensors

Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been...

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Detalles Bibliográficos
Autores principales: Song, Peishuai, Ma, Zhe, Ma, Jing, Yang, Liangliang, Wei, Jiangtao, Zhao, Yongmei, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7020044/
https://www.ncbi.nlm.nih.gov/pubmed/31906297
http://dx.doi.org/10.3390/mi11010056

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7020044/
https://www.ncbi.nlm.nih.gov/pubmed/31906297
http://dx.doi.org/10.3390/mi11010056

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