Cargando…

Recent Progress of Miniature MEMS Pressure Sensors

Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been...

Descripción completa

Detalles Bibliográficos
Autores principales:	Song, Peishuai, Ma, Zhe, Ma, Jing, Yang, Liangliang, Wei, Jiangtao, Zhao, Yongmei, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7020044/ https://www.ncbi.nlm.nih.gov/pubmed/31906297 http://dx.doi.org/10.3390/mi11010056

Ejemplares similares

The Recent Progress of MEMS/NEMS Resonators
por: Wei, Lei, et al.
Publicado: (2021)

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology
por: Song, Peishuai, et al.
Publicado: (2020)

The Fabrication of Micro/Nano Structures by Laser Machining
por: Yang, Liangliang, et al.
Publicado: (2019)

Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching
por: Ma, Jing, et al.
Publicado: (2021)

Thermoelectric Properties of Cu(2)Se Nano-Thin Film by Magnetron Sputtering
por: Yang, Liangliang, et al.
Publicado: (2021)

Application of Miniature FBG-MEMS Pressure Sensor in Penetration Process of Jacked Pile
por: Liu, Xueying, et al.
Publicado: (2020)

Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices
por: Ma, Zhe, et al.
Publicado: (2018)

A Thin Film Flexible Supercapacitor Based on Oblique Angle Deposited Ni/NiO Nanowire Arrays
por: Ma, Jing, et al.
Publicado: (2018)

A Novel Nanocone Cluster Microstructure with Anti-reflection and Superhydrophobic Properties for Photovoltaic Devices
por: Ma, Jing, et al.
Publicado: (2018)

Doping Effect on Cu(2)Se Thermoelectric Performance: A Review
por: Qin, Yuanhao, et al.
Publicado: (2020)

Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone
por: Hopper, Richard, et al.
Publicado: (2022)

A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel
por: Tian, Ye, et al.
Publicado: (2011)

Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology
por: Chen, Jiawen, et al.
Publicado: (2018)

MEMS Enabled Miniature Two-Photon Microscopy for Biomedical Imaging
por: Yu, Xiaomin, et al.
Publicado: (2023)

Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing
por: Kashani Ilkhechi, Afshin, et al.
Publicado: (2022)

A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
por: Yang, Chaoxiang, et al.
Publicado: (2022)

A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers
por: He, Yurong, et al.
Publicado: (2021)

ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release
por: Xu, Pengfei, et al.
Publicado: (2021)

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost
por: Fu, Yingchun, et al.
Publicado: (2022)

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC
por: Li, Xiangyu, et al.
Publicado: (2020)

Novel Designs for Application Specific MEMS Pressure Sensors
por: Fragiacomo, Giulio, et al.
Publicado: (2010)

An update on the CardioMEMS pulmonary artery pressure sensor
por: Ayyadurai, Puvanalingam, et al.
Publicado: (2019)

MEMS Inertial Sensors Based Gait Analysis for Rehabilitation Assessment via Multi-Sensor Fusion
por: Qiu, Sen, et al.
Publicado: (2018)

Review of Recent Development of MEMS Speakers
por: Wang, Haoran, et al.
Publicado: (2021)

MEMS enabled miniaturized light-sheet microscopy with all optical control
por: Bakas, Spyridon, et al.
Publicado: (2021)

Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via †
por: Zhang, Meng, et al.
Publicado: (2018)

MEMS Differential Pressure Sensor with Dynamic Pressure Canceler for Precision Altitude Estimation
por: Yasunaga, Shun, et al.
Publicado: (2023)

Recent Progress in Flexible Pressure Sensor Arrays
por: Duan, Yanhao, et al.
Publicado: (2022)

Recent Advances in MEMS-Based Microthrusters
por: Liu, Bendong, et al.
Publicado: (2019)

A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
por: Qi, Yonghong, et al.
Publicado: (2022)

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope
por: Liu, Tianbo, et al.
Publicado: (2019)

Miniaturized structured illumination microscopy using two 3-axis MEMS micromirrors
por: Tinning, Peter, et al.
Publicado: (2022)

Compact Sphere-Shaped Airflow Vector Sensor Based on MEMS Differential Pressure Sensors
por: Haneda, Kotaro, et al.
Publicado: (2022)

Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor
por: Hasenkamp, Willyan, et al.
Publicado: (2012)

Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor
por: Zhang, Yunfan, et al.
Publicado: (2021)

An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring
por: Zhang, Lan, et al.
Publicado: (2022)

CTD Sensors for Ocean Investigation Including State of Art and Commercially Available
por: Xiao, Shiyu, et al.
Publicado: (2023)

Handheld miniature probe integrating diffuse optical tomography with photoacoustic imaging through a MEMS scanning mirror
por: Yang, Hao, et al.
Publicado: (2013)

Recent progress in flexible micro-pressure sensors for wearable health monitoring
por: Hu, Jianguo, et al.
Publicado: (2023)

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes
por: Su, Yan, et al.
Publicado: (2020)

Cannot write session to /tmp/vufind_sessions/sess_0ifhtrbeeruef29prq99jlq0nf