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Gas Permeation Property of Silicon Carbide Membranes Synthesized by Counter-Diffusion Chemical Vapor Deposition
An amorphous silicon carbide (SiC) membrane was synthesized by counter-diffusion chemical vapor deposition (CDCVD) using silacyclobutane (SCB) at 788 K. The SiC membrane on a Ni-γ-alumina (Al(2)O(3)) α-coated Al(2)O(3) porous support possessed a H(2) permeance of 1.2 × 10(−7) mol·m(−2)·s(−1)·Pa(−1)...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7023062/ https://www.ncbi.nlm.nih.gov/pubmed/31935853 http://dx.doi.org/10.3390/membranes10010011 |