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Gas Permeation Property of Silicon Carbide Membranes Synthesized by Counter-Diffusion Chemical Vapor Deposition

An amorphous silicon carbide (SiC) membrane was synthesized by counter-diffusion chemical vapor deposition (CDCVD) using silacyclobutane (SCB) at 788 K. The SiC membrane on a Ni-γ-alumina (Al(2)O(3)) α-coated Al(2)O(3) porous support possessed a H(2) permeance of 1.2 × 10(−7) mol·m(−2)·s(−1)·Pa(−1)...

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Detalles Bibliográficos
Autores principales:	Nagano, Takayuki, Sato, Koji, Kawahara, Koichi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7023062/ https://www.ncbi.nlm.nih.gov/pubmed/31935853 http://dx.doi.org/10.3390/membranes10010011

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