In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm...

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Detalles Bibliográficos
Autores principales: Setiono, Andi, Bertke, Maik, Nyang’au, Wilson Ombati, Xu, Jiushuai, Fahrbach, Michael, Kirsch, Ina, Uhde, Erik, Deutschinger, Alexander, Fantner, Ernest J., Schwalb, Christian H., Wasisto, Hutomo Suryo, Peiner, Erwin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7038349/
https://www.ncbi.nlm.nih.gov/pubmed/31979161
http://dx.doi.org/10.3390/s20030618

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