A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end

A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the sensing element. The DRG operates in force ba...

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Detalles Bibliográficos
Autores principales: Wang, Yihang, Fu, Qiang, Zhang, Yufeng, Zhang, Wenbo, Chen, Dongliang, Yin, Liang, Liu, Xiaowei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7038481/
https://www.ncbi.nlm.nih.gov/pubmed/32012671
http://dx.doi.org/10.3390/s20030687

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7038481/
https://www.ncbi.nlm.nih.gov/pubmed/32012671
http://dx.doi.org/10.3390/s20030687

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