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A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end
A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the sensing element. The DRG operates in force ba...
Autores principales: | Wang, Yihang, Fu, Qiang, Zhang, Yufeng, Zhang, Wenbo, Chen, Dongliang, Yin, Liang, Liu, Xiaowei |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7038481/ https://www.ncbi.nlm.nih.gov/pubmed/32012671 http://dx.doi.org/10.3390/s20030687 |
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