Cargando…
SiGe nanocrystals in SiO(2) with high photosensitivity from visible to short-wave infrared
Films of SiGe nanocrystals (NCs) in oxide have the advantage of tuning the energy band gap by adjusting SiGe NCs composition and size. In this study, SiGe-SiO(2) amorphous films were deposited by magnetron sputtering on Si substrate followed by rapid thermal annealing at 700, 800 and 1000 °C. We inv...
Autores principales: | , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7040041/ https://www.ncbi.nlm.nih.gov/pubmed/32094361 http://dx.doi.org/10.1038/s41598-020-60000-x |