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SiGe nanocrystals in SiO(2) with high photosensitivity from visible to short-wave infrared
Films of SiGe nanocrystals (NCs) in oxide have the advantage of tuning the energy band gap by adjusting SiGe NCs composition and size. In this study, SiGe-SiO(2) amorphous films were deposited by magnetron sputtering on Si substrate followed by rapid thermal annealing at 700, 800 and 1000 °C. We inv...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7040041/ https://www.ncbi.nlm.nih.gov/pubmed/32094361 http://dx.doi.org/10.1038/s41598-020-60000-x |