Fabrication of a Novel Nanofluidic Device Featuring ZnO Nanochannels

[Image: see text] We developed a novel fabrication method for nanochannels that are easily scaled up to mass production by selectively growing zinc oxide (ZnO) nanostructures and covering using a flat PDMS surface to make hollow nanochannels. Nanochannels are used in the biotechnological and environmental fields, being employed for DNA analysis and water purification, due to their unique features of capillary-induced negative pressure and an electrical double-layer overlap. However, existing nanochannel fabrication methods are complicated, costly, and not amenable to mass production. Here, we developed a novel nanochannel fabrication method. The pillar-like dense ZnO nanostructures were grown in a solution process, which is easily applicable to mass production. The size of the fabricated ZnO nanostructures has a thickness of 30–300 nm and a diameter on the order of 10(2) nm, which are easily adjusted by synthesis times. The ZnO nanostructures were covered by the flat polydimethylsiloxane (PDMS) surface, and then the cracks between ZnO nanostructures served as hollow nanochannels. Because the suggested fabrication process has no thermal shrinkage, the process has higher production efficiency than existing nanochannel mass production methods based on the thermal/pressure process. The mechanical strength of the fabricated ZnO nanostructures was tested with repetitive tape peeling tests. Finally, we briefly verified the nanochannel performance by applying the nanochannel to the micro/nanofluidic system, whose performance is easily evaluated and visualized by current–voltage relation.