Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs

Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi(2)Te(3)/(Pt, Au) multilayers are designed with p-type Sb(2)Te(3) legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the a...

Descripción completa

Detalles Bibliográficos
Autores principales: Liu, Yang, Mu, Erzhen, Wu, Zhenhua, Che, Zhanxun, Sun, Fangyuan, Fu, Xuecheng, Wang, Fengdan, Wang, Xinwei, Hu, Zhiyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Singapore 2020
Materias:
Full Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7052102/
https://www.ncbi.nlm.nih.gov/pubmed/32124134
http://dx.doi.org/10.1186/s40580-020-0218-x
_version_ 1783502797302398976
author Liu, Yang
Mu, Erzhen
Wu, Zhenhua
Che, Zhanxun
Sun, Fangyuan
Fu, Xuecheng
Wang, Fengdan
Wang, Xinwei
Hu, Zhiyu
author_facet Liu, Yang
Mu, Erzhen
Wu, Zhenhua
Che, Zhanxun
Sun, Fangyuan
Fu, Xuecheng
Wang, Fengdan
Wang, Xinwei
Hu, Zhiyu
author_sort Liu, Yang
collection PubMed
description Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi(2)Te(3)/(Pt, Au) multilayers are designed with p-type Sb(2)Te(3) legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi(2)Te(3)/Pt multilayer reaches 46.5 μW cm(−1) K(−2) at 303 K, which corresponds to more than a 350% enhancement when compared to pristine Bi(2)Te(3). The annealed Bi(2)Te(3)/Au multilayers have a lower power factor than pristine Bi(2)Te(3). The power of the device with Sb(2)Te(3) and Bi(2)Te(3)/Pt multilayers measures 20.9 nW at 463 K and the calculated maximum output power reaches 10.5 nW, which is 39.5% higher than the device based on Sb(2)Te(3) and Bi(2)Te(3), and 96.7% higher than the Sb(2)Te(3) and Bi(2)Te(3)/Au multilayers one. This work can provide an opportunity to improve TE properties by using multilayer structures and novel ultrathin MEMS TE devices in a wide variety of applications.
format Online
Article
Text
id pubmed-7052102
institution National Center for Biotechnology Information
language English
publishDate 2020
publisher Springer Singapore
record_format MEDLINE/PubMed
spelling pubmed-70521022020-03-16 Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs Liu, Yang Mu, Erzhen Wu, Zhenhua Che, Zhanxun Sun, Fangyuan Fu, Xuecheng Wang, Fengdan Wang, Xinwei Hu, Zhiyu Nano Converg Full Paper Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi(2)Te(3)/(Pt, Au) multilayers are designed with p-type Sb(2)Te(3) legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi(2)Te(3)/Pt multilayer reaches 46.5 μW cm(−1) K(−2) at 303 K, which corresponds to more than a 350% enhancement when compared to pristine Bi(2)Te(3). The annealed Bi(2)Te(3)/Au multilayers have a lower power factor than pristine Bi(2)Te(3). The power of the device with Sb(2)Te(3) and Bi(2)Te(3)/Pt multilayers measures 20.9 nW at 463 K and the calculated maximum output power reaches 10.5 nW, which is 39.5% higher than the device based on Sb(2)Te(3) and Bi(2)Te(3), and 96.7% higher than the Sb(2)Te(3) and Bi(2)Te(3)/Au multilayers one. This work can provide an opportunity to improve TE properties by using multilayer structures and novel ultrathin MEMS TE devices in a wide variety of applications. Springer Singapore 2020-03-03 /pmc/articles/PMC7052102/ /pubmed/32124134 http://dx.doi.org/10.1186/s40580-020-0218-x Text en © The Author(s) 2020 Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Full Paper
Liu, Yang
Mu, Erzhen
Wu, Zhenhua
Che, Zhanxun
Sun, Fangyuan
Fu, Xuecheng
Wang, Fengdan
Wang, Xinwei
Hu, Zhiyu
Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs
title Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs
title_full Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs
title_fullStr Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs
title_full_unstemmed Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs
title_short Ultrathin MEMS thermoelectric generator with Bi(2)Te(3)/(Pt, Au) multilayers and Sb(2)Te(3) legs
title_sort ultrathin mems thermoelectric generator with bi(2)te(3)/(pt, au) multilayers and sb(2)te(3) legs
topic Full Paper
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7052102/
https://www.ncbi.nlm.nih.gov/pubmed/32124134
http://dx.doi.org/10.1186/s40580-020-0218-x
work_keys_str_mv AT liuyang ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT muerzhen ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT wuzhenhua ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT chezhanxun ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT sunfangyuan ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT fuxuecheng ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT wangfengdan ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT wangxinwei ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs
AT huzhiyu ultrathinmemsthermoelectricgeneratorwithbi2te3ptaumultilayersandsb2te3legs

Ejemplares similares