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A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF)-based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a new computational scheme for the simulation of the angular-d...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
International Union of Crystallography
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7064098/ https://www.ncbi.nlm.nih.gov/pubmed/32153277 http://dx.doi.org/10.1107/S1600577519016345 |