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A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF)-based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a new computational scheme for the simulation of the angular-d...

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Detalles Bibliográficos
Autores principales:	Nikolaev, K. V., Soltwisch, V., Hönicke, P., Scholze, F., de la Rie, J., Yakunin, S. N., Makhotkin, I. A., van de Kruijs, R. W. E., Bijkerk, F.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	International Union of Crystallography 2020
Materias:	Research Papers
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7064098/ https://www.ncbi.nlm.nih.gov/pubmed/32153277 http://dx.doi.org/10.1107/S1600577519016345

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