Cargando…
Quantum Tunneling Hygrometer with Temperature Stabilized Nanometer Gap
We present the design, fabrication and response of a humidity sensor based on electrical tunneling through temperature-stabilized nanometer gaps. The sensor consists of two stacked metal electrodes separated by ~2.5 nm of vertical air gap. Upper and lower electrodes rest on separate 1.5 μm thick pol...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7064480/ https://www.ncbi.nlm.nih.gov/pubmed/32157116 http://dx.doi.org/10.1038/s41598-020-60484-7 |