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Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection
A highly sensitive photoacoustic (PA) microcavity gas sensor for leak detection is proposed. The miniature and low-cost gas sensor mainly consisted of a micro-electro-mechanical system (MEMS) microphone and a stainless-steel capillary with two small holes opened on the side wall. Different from trad...
Autores principales: | Chen, Ke, Chen, Yewei, Zhang, Bo, Mei, Liang, Guo, Min, Deng, Hong, Liu, Shuai, Ma, Fengxiang, Gong, Zhenfeng, Yu, Qingxu |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7070655/ https://www.ncbi.nlm.nih.gov/pubmed/32093237 http://dx.doi.org/10.3390/s20041164 |
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