Design for a Highly Stable Laser Source Based on the Error Model of High-Speed High-Resolution Heterodyne Interferometers

Heterodyne interferometers with two opposite Doppler shift interference signals have been proposed for high-resolution measurement with high measurement speed, which can be used in the background of high-speed high-resolution measurement. However, a measurement error model for high-speed high-resolution heterodyne interferometers (HSHR-HIs) has not yet been proposed. We established a HSHR-HI measurement error model, analyzed the influence of beat frequency stability with a simplified optical structure, and then designed an offset-locked dual-frequency laser source with a digital control system to reduce the impact of beat frequency drift. Experiments were used to verify the correction of the measurement error model and the validity of the laser source. The results show that the new laser source has a maximum beat frequency range of 45 MHz, which shows the improvements in the measuring speed and resolution.