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Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell

Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The concept of a CMUT with an annular embossed pattern on a membrane working in collapse mode is proposed to further improv...

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Detalles Bibliográficos
Autores principales:	Yu, Yuanyu, Wang, Jiujiang, Liu, Xin, Pun, Sio Hang, Zhang, Shuang, Cheng, Ching-Hsiang, Lei, Kin Fong, Vai, Mang I, Mak, Peng Un
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074606/ https://www.ncbi.nlm.nih.gov/pubmed/32093303 http://dx.doi.org/10.3390/mi11020217

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