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Influence of Post-Annealing on the Structural and Nanomechanical Properties of Co Thin Films

The correlations between the microstructure and nanomechanical properties of a series of thermal annealed Co thin films were investigated. The Co thin films were deposited on glass substrates using a magnetron sputtering system at ambient conditions followed by subsequent annealing conducted at vari...

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Detalles Bibliográficos
Autores principales: Hwang, Yeong-Maw, Pan, Cheng-Tang, Lu, Ying-Xu, Jian, Sheng-Rui, Chang, Huang-Wei, Juang, Jenh-Yih
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074635/
https://www.ncbi.nlm.nih.gov/pubmed/32050539
http://dx.doi.org/10.3390/mi11020180

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