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Proportional Microvalve Using a Unimorph Piezoelectric Microactuator
Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found i...
Autores principales: | Gunda, Arun, Özkayar, Gürhan, Tichem, Marcel, Ghatkesar, Murali Krishna |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074653/ https://www.ncbi.nlm.nih.gov/pubmed/31991593 http://dx.doi.org/10.3390/mi11020130 |
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