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Fabrication of Silicon Microfluidic Chips for Acoustic Particle Focusing Using Direct Laser Writing

We have developed a fast and simple method for fabricating microfluidic channels in silicon using direct laser writing. The laser microfabrication process was optimised to generate microfluidic channels with vertical walls suitable for acoustic particle focusing by bulk acoustic waves. The width of...

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Detalles Bibliográficos
Autores principales:	Fornell, Anna, Söderbäck, Per, Liu, Zhenhua, De Albuquerque Moreira, Milena, Tenje, Maria
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074961/ https://www.ncbi.nlm.nih.gov/pubmed/31972982 http://dx.doi.org/10.3390/mi11020113

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