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Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE...

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Detalles Bibliográficos
Autores principales:	Skoupy, Radim, Fort, Tomas, Krzyzanek, Vladislav
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7075161/ https://www.ncbi.nlm.nih.gov/pubmed/32075242 http://dx.doi.org/10.3390/nano10020332

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