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Optical Properties of Titanium in the Regime of the Limited Light Penetration

In this study, the titanium layers from 12 to 1470 nm thick were fabricated by using the method involving dynamically changed working gas pressure (gas injection magnetron sputtering). The influence of the deposition time on the optical and electrical properties of Ti films, as well as on their micr...

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Detalles Bibliográficos
Autor principal: Skowronski, Lukasz
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7078783/
https://www.ncbi.nlm.nih.gov/pubmed/32093327
http://dx.doi.org/10.3390/ma13040952

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