Quasi-Static Pull-in: an Instability in Electrostatic Actuators
We identify a new instability in electrostatic actuators dubbed quasi-static pull-in. We report experimental evidence of the instability and study its characteristics in two types of micro actuators operating in ambient air. We found that the underlying mechanism is a fast-slow dynamic interaction b...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7081203/ https://www.ncbi.nlm.nih.gov/pubmed/32193400 http://dx.doi.org/10.1038/s41598-020-61534-w |