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Plasma Fabrication and SERS Functionality of Gold Crowned Silicon Submicrometer Pillars
Sequential plasma processes combined with specific lithographic methods allow for the fabrication of advanced material structures. In the present work, we used self-assembled colloidal monolayers as lithographic structures for the conformation of ordered Si submicrometer pillars by reactive ion etch...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085028/ https://www.ncbi.nlm.nih.gov/pubmed/32164146 http://dx.doi.org/10.3390/ma13051244 |