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Experimental and Theoretical Study of Multifrequency Surface Acoustic Wave Devices in a Single Si/SiO(2)/ZnO Piezoelectric Structure
The propagation of surface acoustic waves (SAWs) along a ZnO/SiO(2)/Si piezoelectric structure is experimentally and theoretically studied. Six surface acoustic modes were experimentally detected in the 134 to 570 MHz frequency range, for acoustic wavelength λ = 30 μm, and for SiO(2) and ZnO layers...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085766/ https://www.ncbi.nlm.nih.gov/pubmed/32138294 http://dx.doi.org/10.3390/s20051380 |