An optimised silicon piezoresistive microcantilever sensor for surface stress studies

Surface stress is a versatile and efficient means to study various physical, chemical, biochemical and biological processes. This work focuses on developing high sensitive piezoresistive microcantilever designs to study surface stress. The cantilevers are made of silicon with rectangular holes at th...

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Detalles Bibliográficos
Autores principales: Ansari, Mohd. Zahid, Cho, Chongdu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Berlin Heidelberg 2015
Materias:
Technical Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7088182/
https://www.ncbi.nlm.nih.gov/pubmed/32214690
http://dx.doi.org/10.1007/s00542-015-2615-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7088182/
https://www.ncbi.nlm.nih.gov/pubmed/32214690
http://dx.doi.org/10.1007/s00542-015-2615-3

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