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An optimised silicon piezoresistive microcantilever sensor for surface stress studies
Surface stress is a versatile and efficient means to study various physical, chemical, biochemical and biological processes. This work focuses on developing high sensitive piezoresistive microcantilever designs to study surface stress. The cantilevers are made of silicon with rectangular holes at th...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer Berlin Heidelberg
2015
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7088182/ https://www.ncbi.nlm.nih.gov/pubmed/32214690 http://dx.doi.org/10.1007/s00542-015-2615-3 |