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Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication
Surface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with t...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7096422/ https://www.ncbi.nlm.nih.gov/pubmed/32214137 http://dx.doi.org/10.1038/s41598-020-61975-3 |
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author | Whitworth, Guy L. Francone, Achille Sotomayor-Torres, Clivia M. Kehagias, Nikolaos |
author_facet | Whitworth, Guy L. Francone, Achille Sotomayor-Torres, Clivia M. Kehagias, Nikolaos |
author_sort | Whitworth, Guy L. |
collection | PubMed |
description | Surface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with the speed of production. Here we present a new real-time optical scatterometry technique, applicable at the mesoscale when optical inspection produces multiple orders of diffraction. We validate this method by inspecting multiple silicon gratings with a variety of structural parameters. These measurements are cross-referenced with FIB, SEM and scanning stylus profilometry. Finally, we measure thermally imprinted structures as a function of imprinting temperature in order to demonstrate the method suitable for in-line quality control in nanoimprint lithography. |
format | Online Article Text |
id | pubmed-7096422 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-70964222020-03-30 Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication Whitworth, Guy L. Francone, Achille Sotomayor-Torres, Clivia M. Kehagias, Nikolaos Sci Rep Article Surface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with the speed of production. Here we present a new real-time optical scatterometry technique, applicable at the mesoscale when optical inspection produces multiple orders of diffraction. We validate this method by inspecting multiple silicon gratings with a variety of structural parameters. These measurements are cross-referenced with FIB, SEM and scanning stylus profilometry. Finally, we measure thermally imprinted structures as a function of imprinting temperature in order to demonstrate the method suitable for in-line quality control in nanoimprint lithography. Nature Publishing Group UK 2020-03-25 /pmc/articles/PMC7096422/ /pubmed/32214137 http://dx.doi.org/10.1038/s41598-020-61975-3 Text en © The Author(s) 2020 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Whitworth, Guy L. Francone, Achille Sotomayor-Torres, Clivia M. Kehagias, Nikolaos Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication |
title | Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication |
title_full | Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication |
title_fullStr | Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication |
title_full_unstemmed | Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication |
title_short | Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication |
title_sort | real-time optical dimensional metrology via diffractometry for nanofabrication |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7096422/ https://www.ncbi.nlm.nih.gov/pubmed/32214137 http://dx.doi.org/10.1038/s41598-020-61975-3 |
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