Real-time Optical Dimensional Metrology via Diffractometry for Nanofabrication

Surface patterning technologies represent a worldwide growing industry, creating smart surfaces and micro/nanoscale device. The advent of large-area, high-speed imprinting technologies has created an ever-growing need for rapid and non-destructive dimensional metrology techniques to keep pace with t...

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Detalles Bibliográficos
Autores principales: Whitworth, Guy L., Francone, Achille, Sotomayor-Torres, Clivia M., Kehagias, Nikolaos
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7096422/
https://www.ncbi.nlm.nih.gov/pubmed/32214137
http://dx.doi.org/10.1038/s41598-020-61975-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7096422/
https://www.ncbi.nlm.nih.gov/pubmed/32214137
http://dx.doi.org/10.1038/s41598-020-61975-3

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