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A Flow-Through Microfluidic Relative Permittivity Sensor

In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and out...

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Detalles Bibliográficos
Autores principales:	Zeng, Yaxiang, Sanders, Remco, Wiegerink, Remco, Lötters, Joost
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7142741/ https://www.ncbi.nlm.nih.gov/pubmed/32245134 http://dx.doi.org/10.3390/mi11030325

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