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Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency

The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to t...

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Autores principales: Xue, Li, Pang, Yingfei, Liu, Wenjing, Liu, Liwei, Pang, Hui, Cao, Axiu, Shi, Lifang, Fu, Yongqi, Deng, Qiling
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7142910/
https://www.ncbi.nlm.nih.gov/pubmed/32214035
http://dx.doi.org/10.3390/mi11030338
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author Xue, Li
Pang, Yingfei
Liu, Wenjing
Liu, Liwei
Pang, Hui
Cao, Axiu
Shi, Lifang
Fu, Yongqi
Deng, Qiling
author_facet Xue, Li
Pang, Yingfei
Liu, Wenjing
Liu, Liwei
Pang, Hui
Cao, Axiu
Shi, Lifang
Fu, Yongqi
Deng, Qiling
author_sort Xue, Li
collection PubMed
description The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to the periodicity of the MLA, which seriously affects the uniformity of the homogenized light spot. To solve this problem, a novel random microlens array (rMLA) structure was proposed for the purpose of achieving beam homogenization. The coherence in the homogenization process is suppressed by means of breaking the periodicity of the MLA. The homogenized light spot with a high energy utilization is then obtained accordingly. In the fabrication process, a clever method of combining chemical etching with lithography technology is performed to fabricate a honeycomb rMLA and a rectangular rMLA. The experimental results show that the energy utilization rate of the two types of the rMLAs is about 90%, and the uniformity of the homogenized light spots generated by the honeycomb rMLA and the rectangular rMLA are more than 80% and 85%, respectively. Meanwhile, fully cost-effective fabrication is possible to be realized.
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spelling pubmed-71429102020-04-14 Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency Xue, Li Pang, Yingfei Liu, Wenjing Liu, Liwei Pang, Hui Cao, Axiu Shi, Lifang Fu, Yongqi Deng, Qiling Micromachines (Basel) Article The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to the periodicity of the MLA, which seriously affects the uniformity of the homogenized light spot. To solve this problem, a novel random microlens array (rMLA) structure was proposed for the purpose of achieving beam homogenization. The coherence in the homogenization process is suppressed by means of breaking the periodicity of the MLA. The homogenized light spot with a high energy utilization is then obtained accordingly. In the fabrication process, a clever method of combining chemical etching with lithography technology is performed to fabricate a honeycomb rMLA and a rectangular rMLA. The experimental results show that the energy utilization rate of the two types of the rMLAs is about 90%, and the uniformity of the homogenized light spots generated by the honeycomb rMLA and the rectangular rMLA are more than 80% and 85%, respectively. Meanwhile, fully cost-effective fabrication is possible to be realized. MDPI 2020-03-24 /pmc/articles/PMC7142910/ /pubmed/32214035 http://dx.doi.org/10.3390/mi11030338 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Xue, Li
Pang, Yingfei
Liu, Wenjing
Liu, Liwei
Pang, Hui
Cao, Axiu
Shi, Lifang
Fu, Yongqi
Deng, Qiling
Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency
title Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency
title_full Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency
title_fullStr Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency
title_full_unstemmed Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency
title_short Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency
title_sort fabrication of random microlens array for laser beam homogenization with high efficiency
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7142910/
https://www.ncbi.nlm.nih.gov/pubmed/32214035
http://dx.doi.org/10.3390/mi11030338
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