An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications

Despite the development of energy-efficient devices in various applications, microelectromechanical system (MEMS) electrostatic actuators yet require high voltages to generate large displacements. In this respect, electrets exhibiting quasi-permanent electrical charges allow large fixed voltages to...

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Detalles Bibliográficos
Autores principales: Sano, Chikako, Ataka, Manabu, Hashiguchi, Gen, Toshiyoshi, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143079/
https://www.ncbi.nlm.nih.gov/pubmed/32143465
http://dx.doi.org/10.3390/mi11030267

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143079/
https://www.ncbi.nlm.nih.gov/pubmed/32143465
http://dx.doi.org/10.3390/mi11030267

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