Analysis and Compensation of Bias Drift for a Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Bias stability is one of primary characteristics of precise gyroscopes for inertial navigation. Analysis of various sources of the bias drift in a micromachined electrostatically suspended gyroscope (MESG) indicates that the bias stability is dominated by the temperature-induced drift. The analytical results of temperature drift resulting from the rotor structure and capacitive position sensing electronics are modeled and analyzed to characterize the drift mechanism of the MESG. The experimental results indicate that the bias drift is mainly composed of two components, i.e., rapidly changing temperature drift and slowly changing time drift. Both the short-term and long-term bias drift of the MESG are tested and discussed to achieve online bias compensation. Finally, a neural network based-bias compensation scheme is presented and verified experimentally with improved bias stability of the MESG.